VoDM

 client: MKS Instruments

The MKS Vapor on Demand Module (VoDM) is a precision water vapor delivery system for use in semiconductor processing. The task was to update and completely replace the electronics without affecting the mechanical system, existing assembly procedures or existing manufacturing and test procedures.  It was also desirable to improve the control system and add web based diagnostics to the product. A new control algorithm was developed and provided significant performance improvements. Once complete, the Cooper Perkins team installed a beta unit at the end customer site, documented the qualification results and ultimately transferred the design directly into MKS's manufacturing system. (click on the blue icon above to ping the VoDM in our office).